Clean up purge air unit motor and filter motor from dust use instrument air supply. Dust hunter: clean up flange with tube-swivel window T/R-R unit-alignment result normal function. Flowsic 100: clean up transducer A & B also flange from dirty of dust use equipment cleaning tools and instrument air supply. CEMS room: clean up CEMS room analyzer-filter cabinet 0f MCS 100E-CEMS gas room from dirty of dust use equipment cleaning tools and instrument air supply ( RIZAL & UNJ AZRIEL & ANDRI )