Dust hunter: clean up purge air unit-filter motor flange with tube-swivel window T/R & R -alignment T/R  & R result ok. Flowsic: clean up purge air unit-filter motor-transduce A & B. CEMS room: clean area CEMS room-filter cabinet MCS 100E-CEMS gas room from dirty of dust use instrument air supply ( RIZAL & ANDRI )